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ACLS vs ONTO vs MKSI vs COHU vs ENTG

Revenue, margins, valuation, and 5-year total return — side by side.

Live fundamentals10-year financials5-year price chart
ACLS
Axcelis Technologies, Inc.

Semiconductors

TechnologyNASDAQ • US
Market Cap$4.88B
5Y Perf.+490.9%
ONTO
Onto Innovation Inc.

Semiconductors

TechnologyNYSE • US
Market Cap$13.63B
5Y Perf.+781.7%
MKSI
MKS Inc.

Hardware, Equipment & Parts

TechnologyNASDAQ • US
Market Cap$20.25B
5Y Perf.+184.8%
COHU
Cohu, Inc.

Semiconductors

TechnologyNASDAQ • US
Market Cap$2.23B
5Y Perf.+215.3%
ENTG
Entegris, Inc.

Semiconductors

TechnologyNASDAQ • US
Market Cap$22.48B
5Y Perf.+146.6%

ACLS vs ONTO vs MKSI vs COHU vs ENTG — Key Financials

Market cap, revenue, margins, and valuation side-by-side.

Company Snapshot
ACLS logoACLS
ONTO logoONTO
MKSI logoMKSI
COHU logoCOHU
ENTG logoENTG
IndustrySemiconductorsSemiconductorsHardware, Equipment & PartsSemiconductorsSemiconductors
Market Cap$4.88B$13.63B$20.25B$2.23B$22.48B
Revenue (TTM)$845M$1.03B$4.07B$481M$3.24B
Net Income (TTM)$101M$106M$327M$-56M$265M
Gross Margin43.6%48.8%45.2%25.7%43.2%
Operating Margin11.6%10.0%14.8%-10.6%29.1%
Forward P/E43.5x38.7x30.4x89.2x41.4x
Total Debt$42M$17M$4.69B$359M$3.89B
Cash & Equiv.$145M$346M$675M$227M$360M

ACLS vs ONTO vs MKSI vs COHU vs ENTGLong-Term Stock Performance

Price return indexed to 100 at period start. Dividends excluded.

ACLS
ONTO
MKSI
COHU
ENTG
StockMay 20May 26Return
Axcelis Technologie… (ACLS)100590.9+490.9%
Onto Innovation Inc. (ONTO)100881.7+781.7%
MKS Inc. (MKSI)100284.8+184.8%
Cohu, Inc. (COHU)100315.3+215.3%
Entegris, Inc. (ENTG)100246.6+146.6%

Price return only. Dividends and distributions are not included.

Quick Verdict: ACLS vs ONTO vs MKSI vs COHU vs ENTG

Each card shows where this stock fits in a portfolio — not just who wins on paper.

Bottom line: ACLS and MKSI are tied at the top with 3 categories each (5-stock set) — the right choice depends on your priorities. MKS Inc. is the stronger pick specifically for valuation and capital efficiency and dividend income and shareholder returns. COHU also leads in specific categories worth noting. As sector peers, any of these can serve as alternatives in the same allocation.
ACLS
Axcelis Technologies, Inc.
The Long-Run Compounder

ACLS carries the broadest edge in this set and is the clearest fit for long-term compounding and sleep-well-at-night.

  • 15.1% 10Y total return vs ONTO's 14.3%
  • Lower volatility, beta 2.00, Low D/E 4.1%, current ratio 4.77x
  • 11.9% margin vs COHU's -11.5%
  • Beta 2.00 vs ENTG's 2.66, lower leverage
Best for: long-term compounding and sleep-well-at-night
ONTO
Onto Innovation Inc.
The Value Pick

ONTO is the clearest fit if your priority is valuation efficiency.

  • PEG 1.12 vs ACLS's 2.06
Best for: valuation efficiency
MKSI
MKS Inc.
The Income Pick

MKSI is the #2 pick in this set and the best alternative if income & stability and growth exposure is your priority.

  • Dividend streak 0 yrs, beta 2.64, yield 0.3%
  • Rev growth 9.6%, EPS growth 55.5%, 3Y rev CAGR 3.5%
  • Lower P/E (30.4x vs 41.4x)
  • 0.3% yield, vs ENTG's 0.3%, (3 stocks pay no dividend)
Best for: income & stability and growth exposure
COHU
Cohu, Inc.
The Defensive Pick

COHU ranks third and is worth considering specifically for defensive.

  • Beta 2.13, current ratio 6.88x
  • 12.7% revenue growth vs ACLS's -17.6%
Best for: defensive
ENTG
Entegris, Inc.
The Technology Pick

Among these 5 stocks, ENTG doesn't own a clear edge in any measured category.

Best for: technology exposure
See the full category breakdown
CategoryWinnerWhy
GrowthCOHU logoCOHU12.7% revenue growth vs ACLS's -17.6%
ValueMKSI logoMKSILower P/E (30.4x vs 41.4x)
Quality / MarginsACLS logoACLS11.9% margin vs COHU's -11.5%
Stability / SafetyACLS logoACLSBeta 2.00 vs ENTG's 2.66, lower leverage
DividendsMKSI logoMKSI0.3% yield, vs ENTG's 0.3%, (3 stocks pay no dividend)
Momentum (1Y)MKSI logoMKSI+306.1% vs ENTG's +88.9%
Efficiency (ROA)ACLS logoACLS7.5% ROA vs COHU's -4.9%, ROIC 9.6% vs -5.7%

ACLS vs ONTO vs MKSI vs COHU vs ENTG — Revenue Breakdown by Segment

How each company's revenue is distributed across its business units

ACLSAxcelis Technologies, Inc.
FY 2025
Systems
68.1%$571M
Aftermarket
31.9%$268M
ONTOOnto Innovation Inc.
FY 2025
Systems And Software Revenue
84.3%$848M
Parts Revenue
8.4%$84M
Service Revenue
7.3%$73M
MKSIMKS Inc.
FY 2025
Product
87.4%$3.4B
Service
12.6%$495M
COHUCohu, Inc.
FY 2014
Semiconductor Equipment
95.0%$317M
Microwave Communications Equipment
5.0%$17M
ENTGEntegris, Inc.
FY 2025
Advanced Purity Solutions
56.1%$1.8B
Materials Solutions MS
43.9%$1.4B

ACLS vs ONTO vs MKSI vs COHU vs ENTG — Financial Metrics

Side-by-side numbers across 5 stocks — who leads on profitability, valuation, growth, and risk.

BEST OVERALLMKSILAGGINGENTG

Income & Cash Flow (Last 12 Months)

Evenly matched — ONTO and COHU each lead in 2 of 6 comparable metrics.

MKSI is the larger business by revenue, generating $4.1B annually — 8.5x COHU's $481M. ACLS is the more profitable business, keeping 11.9% of every revenue dollar as net income compared to COHU's -11.5%. On growth, COHU holds the edge at +29.3% YoY revenue growth, suggesting stronger near-term business momentum.

MetricACLS logoACLSAxcelis Technolog…ONTO logoONTOOnto Innovation I…MKSI logoMKSIMKS Inc.COHU logoCOHUCohu, Inc.ENTG logoENTGEntegris, Inc.
RevenueTrailing 12 months$845M$1.0B$4.1B$481M$3.2B
EBITDAEarnings before interest/tax$111M$158M$945M-$11M$1.3B
Net IncomeAfter-tax profit$101M$106M$327M-$56M$265M
Free Cash FlowCash after capex$90M$239M$401M$32M$721M
Gross MarginGross profit ÷ Revenue+43.6%+48.8%+45.2%+25.7%+43.2%
Operating MarginEBIT ÷ Revenue+11.6%+10.0%+14.8%-10.6%+29.1%
Net MarginNet income ÷ Revenue+11.9%+10.3%+8.0%-11.5%+8.2%
FCF MarginFCF ÷ Revenue+10.7%+23.2%+9.8%+6.6%+22.3%
Rev. Growth (YoY)Latest quarter vs prior year+3.3%+9.5%+15.2%+29.3%+5.0%
EPS Growth (YoY)Latest quarter vs prior year-65.9%-48.5%+53.2%+60.6%+46.3%
Evenly matched — ONTO and COHU each lead in 2 of 6 comparable metrics.

Valuation Metrics

COHU leads this category, winning 3 of 7 comparable metrics.

At 41.8x trailing earnings, ACLS trades at a 58% valuation discount to ONTO's 98.6x P/E. Adjusting for growth (PEG ratio), ACLS offers better value at 1.98x vs ONTO's 2.85x — a lower PEG means you pay less per unit of expected earnings growth.

MetricACLS logoACLSAxcelis Technolog…ONTO logoONTOOnto Innovation I…MKSI logoMKSIMKS Inc.COHU logoCOHUCohu, Inc.ENTG logoENTGEntegris, Inc.
Market CapShares × price$4.9B$13.6B$20.2B$2.2B$22.5B
Enterprise ValueMkt cap + debt − cash$4.8B$13.3B$24.3B$2.4B$26.0B
Trailing P/EPrice ÷ TTM EPS41.75x98.57x68.83x-29.86x95.26x
Forward P/EPrice ÷ next-FY EPS est.43.49x38.74x30.36x89.21x41.38x
PEG RatioP/E ÷ EPS growth rate1.98x2.85x
EV / EBITDAEnterprise value multiple34.85x68.79x26.70x19.81x
Price / SalesMarket cap ÷ Revenue5.81x13.56x5.15x4.93x7.03x
Price / BookPrice ÷ Book value/share4.86x6.43x7.49x2.82x5.68x
Price / FCFMarket cap ÷ FCF45.56x45.47x40.74x207.83x56.74x
COHU leads this category, winning 3 of 7 comparable metrics.

Profitability & Efficiency

Evenly matched — ACLS and ONTO each lead in 3 of 9 comparable metrics.

MKSI delivers a 12.2% return on equity — every $100 of shareholder capital generates $12 in annual profit, vs $-7 for COHU. ONTO carries lower financial leverage with a 0.01x debt-to-equity ratio, signaling a more conservative balance sheet compared to MKSI's 1.73x. On the Piotroski fundamental quality scale (0–9), MKSI scores 6/9 vs COHU's 4/9, reflecting solid financial health.

MetricACLS logoACLSAxcelis Technolog…ONTO logoONTOOnto Innovation I…MKSI logoMKSIMKS Inc.COHU logoCOHUCohu, Inc.ENTG logoENTGEntegris, Inc.
ROE (TTM)Return on equity+9.8%+5.2%+12.2%-6.8%+6.7%
ROA (TTM)Return on assets+7.5%+4.7%+3.7%-4.9%+3.1%
ROICReturn on invested capital+9.6%+5.7%+6.5%-5.7%+9.3%
ROCEReturn on capital employed+10.4%+6.5%+7.2%-5.9%+11.7%
Piotroski ScoreFundamental quality 0–954645
Debt / EquityFinancial leverage0.04x0.01x1.73x0.46x0.98x
Net DebtTotal debt minus cash-$103M-$329M$4.0B$132M$3.5B
Cash & Equiv.Liquid assets$145M$346M$675M$227M$360M
Total DebtShort + long-term debt$42M$17M$4.7B$359M$3.9B
Interest CoverageEBIT ÷ Interest expense77.10x2.84x-168.82x2.47x
Evenly matched — ACLS and ONTO each lead in 3 of 9 comparable metrics.

Total Returns (Dividends Reinvested)

MKSI leads this category, winning 3 of 6 comparable metrics.

A $10,000 investment in ONTO five years ago would be worth $41,263 today (with dividends reinvested), compared to $12,218 for COHU. Over the past 12 months, MKSI leads with a +306.1% total return vs ENTG's +88.9%. The 3-year compound annual growth rate (CAGR) favors MKSI at 54.1% vs ACLS's 9.7% — a key indicator of consistent wealth creation.

MetricACLS logoACLSAxcelis Technolog…ONTO logoONTOOnto Innovation I…MKSI logoMKSIMKS Inc.COHU logoCOHUCohu, Inc.ENTG logoENTGEntegris, Inc.
YTD ReturnYear-to-date+84.2%+65.2%+78.8%+92.9%+65.1%
1-Year ReturnPast 12 months+173.2%+118.9%+306.1%+199.7%+88.9%
3-Year ReturnCumulative with dividends+32.2%+218.0%+266.0%+40.7%+87.4%
5-Year ReturnCumulative with dividends+286.8%+312.6%+66.5%+22.2%+30.4%
10-Year ReturnCumulative with dividends+1505.9%+1431.7%+750.6%+330.2%+1040.3%
CAGR (3Y)Annualised 3-year return+9.7%+47.1%+54.1%+12.1%+23.3%
MKSI leads this category, winning 3 of 6 comparable metrics.

Risk & Volatility

Evenly matched — ACLS and COHU each lead in 1 of 2 comparable metrics.

ACLS is the less volatile stock with a 2.00 beta — it tends to amplify market swings less than ENTG's 2.66 beta. A beta below 1.0 means the stock typically moves less than the S&P 500. COHU currently trades 93.7% from its 52-week high vs ONTO's 86.8% drawdown — a narrower gap to the peak suggests stronger recent price momentum.

MetricACLS logoACLSAxcelis Technolog…ONTO logoONTOOnto Innovation I…MKSI logoMKSIMKS Inc.COHU logoCOHUCohu, Inc.ENTG logoENTGEntegris, Inc.
Beta (5Y)Sensitivity to S&P 5002.00x2.66x2.64x2.13x2.66x
52-Week HighHighest price in past year$171.60$315.86$326.83$50.68$159.15
52-Week LowLowest price in past year$55.81$85.88$71.49$15.34$66.32
% of 52W HighCurrent price vs 52-week peak+92.5%+86.8%+92.0%+93.7%+92.8%
RSI (14)Momentum oscillator 0–10084.461.065.375.563.8
Avg Volume (50D)Average daily shares traded734K832K1.2M953K2.4M
Evenly matched — ACLS and COHU each lead in 1 of 2 comparable metrics.

Analyst Outlook

Evenly matched — MKSI and ENTG each lead in 1 of 2 comparable metrics.

Analyst consensus: ACLS as "Buy", ONTO as "Buy", MKSI as "Buy", COHU as "Buy", ENTG as "Buy". Consensus price targets imply 12.5% upside for ONTO (target: $308) vs -19.3% for ACLS (target: $128). For income investors, MKSI offers the higher dividend yield at 0.29% vs ENTG's 0.27%.

MetricACLS logoACLSAxcelis Technolog…ONTO logoONTOOnto Innovation I…MKSI logoMKSIMKS Inc.COHU logoCOHUCohu, Inc.ENTG logoENTGEntegris, Inc.
Analyst RatingConsensus buy/hold/sellBuyBuyBuyBuyBuy
Price TargetConsensus 12-month target$128.00$308.33$272.86$49.75$152.00
# AnalystsCovering analysts1211291426
Dividend YieldAnnual dividend ÷ price+0.3%+0.3%
Dividend StreakConsecutive years of raises0002
Dividend / ShareAnnual DPS$0.87$0.40
Buyback YieldShare repurchases ÷ mkt cap+2.5%+0.6%+0.2%+0.3%0.0%
Evenly matched — MKSI and ENTG each lead in 1 of 2 comparable metrics.
Key Takeaway

COHU leads in 1 of 6 categories (Valuation Metrics). MKSI leads in 1 (Total Returns). 4 tied.

Best OverallMKS Inc. (MKSI)Leads 1 of 6 categories
Loading custom metrics...

ACLS vs ONTO vs MKSI vs COHU vs ENTG: Key Questions Answered

10 questions · data-driven answers · updated daily

01

Is ACLS or ONTO or MKSI or COHU or ENTG a better buy right now?

For growth investors, Cohu, Inc.

(COHU) is the stronger pick with 12. 7% revenue growth year-over-year, versus -17. 6% for Axcelis Technologies, Inc. (ACLS). Axcelis Technologies, Inc. (ACLS) offers the better valuation at 41. 8x trailing P/E (43. 5x forward), making it the more compelling value choice. Analysts rate Axcelis Technologies, Inc. (ACLS) a "Buy" — based on 12 analyst ratings — the highest consensus in this comparison. The "better buy" depends entirely on your goals: growth investors should weight revenue trajectory, value investors should weight P/E and PEG, and income investors should weight dividend yield and streak.

02

Which has the better valuation — ACLS or ONTO or MKSI or COHU or ENTG?

On trailing P/E, Axcelis Technologies, Inc.

(ACLS) is the cheapest at 41. 8x versus Onto Innovation Inc. at 98. 6x. On forward P/E, MKS Inc. is actually cheaper at 30. 4x — notably different from the trailing picture, reflecting expected earnings growth. The PEG ratio (P/E divided by earnings growth rate) is the most growth-adjusted single valuation metric: Onto Innovation Inc. wins at 1. 12x versus Axcelis Technologies, Inc. 's 2. 06x — a reasonable growth-adjusted valuation.

03

Which is the better long-term investment — ACLS or ONTO or MKSI or COHU or ENTG?

Over the past 5 years, Onto Innovation Inc.

(ONTO) delivered a total return of +312. 6%, compared to +22. 2% for Cohu, Inc. (COHU). Over 10 years, the gap is even starker: ACLS returned +1506% versus COHU's +330. 2%. Past returns do not guarantee future results, and the stock with the higher historical return may already have its best growth priced in.

04

Which is safer — ACLS or ONTO or MKSI or COHU or ENTG?

By beta (market sensitivity over 5 years), Axcelis Technologies, Inc.

(ACLS) is the lower-risk stock at 2. 00β versus Entegris, Inc. 's 2. 66β — meaning ENTG is approximately 33% more volatile than ACLS relative to the S&P 500. On balance sheet safety, Onto Innovation Inc. (ONTO) carries a lower debt/equity ratio of 1% versus 173% for MKS Inc. — giving it more financial flexibility in a downturn.

05

Which is growing faster — ACLS or ONTO or MKSI or COHU or ENTG?

By revenue growth (latest reported year), Cohu, Inc.

(COHU) is pulling ahead at 12. 7% versus -17. 6% for Axcelis Technologies, Inc. (ACLS). On earnings-per-share growth, the picture is similar: MKS Inc. grew EPS 55. 5% year-over-year, compared to -38. 2% for Axcelis Technologies, Inc.. Over a 3-year CAGR, MKSI leads at 3. 5% annualised revenue growth. Higher growth typically commands a higher valuation multiple — check whether the premium P/E or P/S is justified by the growth rate using the PEG ratio.

06

Which has better profit margins — ACLS or ONTO or MKSI or COHU or ENTG?

Axcelis Technologies, Inc.

(ACLS) is the more profitable company, earning 14. 3% net margin versus -16. 4% for Cohu, Inc. — meaning it keeps 14. 3% of every revenue dollar as bottom-line profit. Operating margin tells a similar story: ENTG leads at 28. 9% versus -13. 3% for COHU. At the gross margin level — before operating expenses — ONTO leads at 49. 7%, reflecting greater pricing power or product mix advantage. Stronger margins indicate durable pricing power, lower cost of revenue, or higher mix of software/services. They are one of the clearest signs of business quality.

07

Is ACLS or ONTO or MKSI or COHU or ENTG more undervalued right now?

The PEG ratio (forward P/E divided by expected earnings growth rate) is the most precise measure of undervaluation relative to growth potential.

By this metric, Onto Innovation Inc. (ONTO) is the more undervalued stock at a PEG of 1. 12x versus Axcelis Technologies, Inc. 's 2. 06x. A PEG below 1. 5 suggests fair-to-attractive pricing relative to expected growth. On forward earnings alone, MKS Inc. (MKSI) trades at 30. 4x forward P/E versus 89. 2x for Cohu, Inc. — 58. 9x cheaper on a one-year earnings basis. Analyst consensus price targets imply the most upside for ONTO: 12. 5% to $308. 33.

08

Which pays a better dividend — ACLS or ONTO or MKSI or COHU or ENTG?

In this comparison, MKSI (0.

3% yield), ENTG (0. 3% yield) pay a dividend. ACLS, ONTO, COHU do not pay a meaningful dividend and should not be held primarily for income.

09

Is ACLS or ONTO or MKSI or COHU or ENTG better for a retirement portfolio?

For long-horizon retirement investors, Axcelis Technologies, Inc.

(ACLS) is the stronger choice — it scores higher on the combination of lower volatility, dividend reliability, and long-term compounding (+1506% 10Y return). Cohu, Inc. (COHU) carries a higher beta of 2. 13 — meaning larger drawdowns in market downturns, which matters significantly when you cannot wait years for a recovery. Both have compounded well over 10 years (ACLS: +1506%, COHU: +330. 2%), confirming both are viable long-term holds — but the lower-volatility option typically results in less emotional selling during corrections. Retirement portfolios generally favour predictability over maximum returns. Consult a financial advisor before making allocation decisions.

10

What are the main differences between ACLS and ONTO and MKSI and COHU and ENTG?

Both stocks operate in the Technology sector, making this a peer-level intra-sector comparison — the same macro tailwinds and headwinds will affect both.

These fundamental differences mean investors should not choose between them on a single metric — the "better stock" depends entirely on which of these characteristics aligns with your investment strategy.

Find Stocks Like These

Explore pre-built screens for each stock's profile, or build a custom screen to find stocks that outperform all of them.

Stocks Like

ACLS

Quality Business

  • Sector: Technology
  • Market Cap > $100B
  • Net Margin > 7%
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ONTO

Steady Growth Compounder

  • Sector: Technology
  • Market Cap > $100B
  • Revenue Growth > 5%
  • Net Margin > 6%
Run This Screen
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MKSI

High-Growth Disruptor

  • Sector: Technology
  • Market Cap > $100B
  • Revenue Growth > 7%
  • Net Margin > 5%
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COHU

High-Growth Disruptor

  • Sector: Technology
  • Market Cap > $100B
  • Revenue Growth > 14%
  • Gross Margin > 15%
Run This Screen
Stocks Like

ENTG

Quality Business

  • Sector: Technology
  • Market Cap > $100B
  • Revenue Growth > 5%
  • Net Margin > 5%
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Custom Screen

Beat Both

Find stocks that outperform ACLS and ONTO and MKSI and COHU and ENTG on the metrics below

Revenue Growth>
%
(ACLS: 3.3% · ONTO: 9.5%)
Net Margin>
%
(ACLS: 11.9% · ONTO: 10.3%)
P/E Ratio<
x
(ACLS: 41.8x · ONTO: 98.6x)

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