Free cash flow margin rebounded to 16.9% in 2026Q2 from 7.8% in 2026Q1, with cumulative operating cash flow of $661.7M exceeding net income of $432.3M, though working capital swings and aggressive buybacks ($205M in 2026Q2) add volatility.
Onto Innovation Inc. (ONTO) cash flow statement — 30-year operating, investing & financing cash flows
| Metric | TTM | Jan'26 | Dec'24 | Dec'23 | Dec'22 | Dec'21 | Dec'20 | Dec'19 | Dec'18 | Dec'17 | Dec'16 | Dec'15 | Dec'14 | Dec'13 | Dec'12 | Dec'11 | Dec'10 | Dec'09 | Dec'08 | Dec'07 | Dec'06 | Dec'05 | Dec'04 | Dec'03 | Dec'02 | Dec'01 | Dec'00 | Dec'99 | Dec'98 | Dec'97 | Dec'96 |
|---|
| Cash from Operations | 266.22M | 328.31M | 245.68M | 171.97M | 136.7M | 175.28M | 105.98M | 18.15M | 35.09M | 64.37M | 46.63M | 33.79M | 4.29M | 6.08M | 22.07M | 45.44M | 16.32M | -12.06M | 15.39M | 23.58M | 20.64M | 8.08M | -3.2M | 6.65M | 1.34M | 22.96M | -4.63M | -700K | -6.9M | 4.2M | 400K |
| Operating CF Margin % | - | 32.66% | 24.88% | 21.08% | 13.6% | 22.22% | 19.04% | 5.93% | 12.82% | 25.23% | 20.03% | 15.24% | 2.37% | 3.45% | 10.1% | 24.28% | 8.36% | -15.33% | 11.74% | 14.73% | 10.26% | 9.74% | -3.8% | 11.37% | 2.34% | 28.92% | -5.25% | -1.84% | -34.33% | 11.44% | 1.32% |
| Operating CF Growth % | 28.42% | 33.64% | 42.86% | 25.8% | -22.01% | 65.38% | 484.06% | -48.29% | -45.48% | 38.04% | 38% | 687.72% | -29.49% | -72.43% | -51.44% | 178.42% | 235.35% | -178.36% | -34.74% | 14.23% | 155.6% | 352.49% | -148.11% | 395.09% | -94.15% | 596.28% | -560.86% | 89.86% | -264.29% | 950% | -82.61% |
| Net Income | 132.6M | 136.76M | 201.67M | 121.16M | 223.33M | 142.35M | 31.02M | 1.91M | 45.1M | 32.91M | 36.95M | 17.96M | -4.64M | 3.46M | 43.87M | 25.23M | 27.02M | -29.63M | -249.69M | 11.86M | 12.71M | 4.98M | 6.75M | 1.77M | -1.43M | 11.74M | 25.03M | 3.3M | -14.1M | 5.8M | 4M |
| Depreciation & Amortization | 80.23M | 60.44M | 62.31M | 67.21M | 64.66M | 65.8M | 67.58M | 16.41M | 6.38M | 5.93M | 6M | 6.1M | 7.11M | 6.94M | 5.89M | 6.32M | 5.78M | 8.65M | 11.74M | 10.2M | 8.67M | 2.65M | 2.21M | 2.17M | 1.65M | 1.37M | 1M | 2M | 5M | 200K | 300K |
| Stock-Based Compensation | 31.15M | 27.62M | 28.58M | 25.51M | 24.43M | 19.54M | 17.66M | 10.59M | 6.06M | 5.67M | 4.78M | 7.6M | 6.24M | 4.11M | 4M | 4.8M | 5.44M | 3.76M | 3.88M | 3.77M | 5.03M | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 |
| Deferred Taxes | 21.39M | 12.87M | -26.48M | -22.43M | -33.6M | -12.62M | -11.63M | -4.12M | 2.16M | 17.21M | 5.01M | 3.98M | -3.94M | -1.51M | -20.81M | -9.02M | -152K | -217K | -2.45M | -3.31M | 5.72M | -109K | 1.49M | -1.1M | 252K | 1.81M | 0 | 0 | 0 | -600K | 300K |
| Other Non-Cash Items | 24.89M | 38.61M | 24.08M | 13.01M | 14.4M | 10.84M | 30.09M | 28.67M | 4.6M | 4.2M | 4.94M | 7.25M | 7.63M | 6.78M | 6.48M | 1.56M | -933K | 5.6M | 238.73M | 893K | 10.53M | 2.9M | 457K | 1.93M | 4.31M | 2.42M | -6.78M | 0 | -200K | -7.3M | -8.5M |
| Working Capital Changes | -24.4M | 52.02M | -44.48M | -32.49M | -156.52M | -50.63M | -28.74M | -35.31M | -29.21M | -1.54M | -11.04M | -9.1M | -8.12M | -13.69M | -17.36M | 16.55M | -20.82M | -217K | 13.17M | 177K | -22M | -2.34M | -14.11M | 1.88M | -3.43M | 5.62M | -23.88M | -6M | 2.4M | 6.1M | 4.3M |
| Change in Receivables | 53.78M | 53.78M | -83.69M | 12.15M | -65.14M | -27.83M | -25.82M | -9.72M | 706K | 430K | -9.28M | -4.34M | 1.15M | 2.63M | -14.74M | 17.96M | -24.11M | -13.2M | 18.3M | -9.52M | 4.22M | 1.72M | -4.63M | 0 | 0 | 0 | 0 | 0 | 0 | 900K | -3.5M |
| Change in Inventory | -3.03M | -3.03M | 19.94M | -16.46M | -93.91M | -57.17M | -42.41M | -9.34M | -31.55M | -4.22M | 4M | -12.53M | -9.39M | -6.76M | -6.7M | -35K | -5.58M | 6.92M | -4.29M | -5.39M | -7.08M | 3.7M | -7.25M | 2.31M | -6.21M | 1.07M | -12.4M | -2M | 900K | -2M | -1.1M |
| Change in Payables | 50.94M | 50.94M | 6.22M | -4.68M | 1.18M | 12.14M | 11.4M | -12.14M | 3.51M | 3.2M | 1.17M | 2.25M | 3.76M | -912K | -2.73M | -3.43M | 2.18M | 3.23M | -12.71M | 3.3M | -6.13M | 1.14M | 794K | 0 | 0 | 0 | 0 | 0 | 0 | -300K | -400K |
| Cash from Investing | -399.51M | -121.57M | -226.55M | -103.39M | -55.69M | -141.79M | -48.6M | 4.1M | 33.77M | -32.52M | 24.47M | -9.08M | -28.53M | -30.02M | -14.93M | -71.21M | -2.77M | 1.69M | -5.71M | -40.49M | 3.6M | 16.02M | -14.14M | -9.11M | -56.48M | -2.43M | -1.37M | -900K | -900K | -3.1M | -2.6M |
| Capital Expenditures | -13.75M | -28.51M | -31.9M | -22.57M | -18.41M | -12.04M | -3.83M | -6.8M | -7.54M | -11.21M | -5.29M | -6.05M | -2.08M | -4.88M | -2.43M | -1.62M | -4.36M | -587K | -3M | -1.72M | -6.89M | -2.68M | -1.77M | -656K | -618K | -2.43M | -1.39M | -1M | -1M | -100K | -300K |
| CapEx % of Revenue | 1.23% | 2.84% | 3.23% | 2.77% | 1.83% | 1.53% | 0.69% | 2.22% | 2.75% | 4.39% | 2.27% | 2.73% | 1.15% | 2.77% | 1.11% | 0.87% | 2.23% | 0.75% | 2.29% | 1.07% | 3.43% | 3.23% | 2.1% | 1.12% | 1.08% | 3.06% | 1.58% | 2.62% | 4.98% | 0.27% | 0.99% |
| Acquisitions | -436.07M | -436.12M | -26.76M | 0 | -4.64M | -23.8M | 0 | 43.88M | 0 | 0 | 0 | 0 | 0 | -3.37M | -18.58M | 0 | -849K | -5.01M | -8.47M | -56.17M | -12.11M | -863K | 0 | 0 | -25.07M | 0 | 0 | 0 | 0 | 0 | 0 |
| Investments | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - | - |
| Other Investing | 0 | 0 | 0 | 2.8M | 0 | 0 | 2.85M | 0 | -5M | -1M | -835K | -2.7M | 0 | 0 | 0 | 0 | 0 | 0 | -30K | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 16K | 0 | 100K | -3M | -2.3M |
| Cash from Financing | 1.17B | -75.15M | -35.67M | -9.47M | -68.35M | 2.67M | -53.7M | -4.2M | -23.91M | -2.75M | -78.11M | -22.97M | -12.68M | 1.44M | 468K | 51.03M | 531K | 217K | 220K | 1.49M | 10.12M | 1.5M | 1.63M | 1.55M | 2.47M | 44.4M | 672K | 36.3M | 8M | 600K | 400K |
| Debt Issued (Net) | 1.47B | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | -60M | 0 | 0 | 0 | 0 | 43.24M | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | -37.7M | 5M | 0 | 0 |
| Equity Issued (Net) | -343.52M | -75.02M | -25.07M | -3.2M | -65.26M | 0 | -52M | -744K | -21.07M | 0 | -8.04M | -20.67M | -12.85M | 1.01M | 0 | 257K | 289K | 217K | 220K | 1.34M | 8.96M | 1.5M | 1.63M | 1.55M | 2.47M | 44.4M | 672K | 74M | 3M | 0 | 0 |
| Dividends Paid | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 |
| Share Repurchases | -355.01M | -75.02M | -25.07M | -3.2M | -65.26M | 0 | 0 | -744K | -21.07M | 0 | -8.04M | -20.67M | -12.85M | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | -7.1M | 0 | 600K | 300K |
| Other Financing | 44.78M | -135K | -10.6M | -6.28M | -3.09M | 2.67M | -1.7M | -3.45M | -2.84M | -2.55M | -10.86M | -2.32M | 161K | 424K | 468K | 7.54M | 242K | 0 | 0 | 148K | 1.17M | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 600K | 400K |
| Net Change in Cash | 1.04B | 133.17M | -20.56M | 57.64M | 6.27M | 32.88M | 6.05M | 18.29M | 44.62M | 29.91M | -6.7M | 1.44M | -37.68M | -23.46M | 7.58M | 25.55M | 13.28M | -9.9M | 10.31M | -15.06M | 34.49M | 25.36M | -15.59M | -827K | -52.59M | 64.91M | -5.34M | 34.6M | 200K | 1.9M | -1.9M |
| Free Cash Flow | 252.47M | 299.8M | 213.77M | 149.4M | 118.3M | 163.24M | 102.16M | 11.34M | 27.55M | 53.16M | 41.34M | 27.74M | 2.21M | 1.2M | 19.64M | 43.82M | 11.96M | -12.65M | 12.39M | 21.86M | 13.75M | 5.4M | -4.97M | 5.99M | 725K | 20.53M | -6.01M | -1.7M | -7.9M | 4.1M | 100K |
| FCF Margin % | 22.54% | 29.82% | 21.65% | 18.31% | 11.77% | 20.69% | 18.36% | 3.71% | 10.06% | 20.84% | 17.76% | 12.51% | 1.22% | 0.68% | 8.99% | 23.41% | 6.12% | -16.08% | 9.46% | 13.65% | 6.84% | 6.51% | -5.9% | 10.24% | 1.26% | 25.85% | -6.83% | -4.46% | -39.3% | 11.17% | 0.33% |
| FCF Growth % | 9.45% | 40.24% | 43.09% | 26.29% | -27.53% | 59.8% | 800.52% | -58.83% | -48.17% | 28.59% | 49.04% | 1157.39% | 83.22% | -93.87% | -55.19% | 266.44% | 194.57% | -202.04% | -43.32% | 58.99% | 154.65% | 208.7% | -182.9% | 726.62% | -96.47% | 441.32% | -253.76% | 78.48% | -292.68% | 4000% | -95.45% |
| FCF per Share | 5.08 | 6.08 | 4.30 | 3.03 | 2.38 | 3.28 | 2.06 | 0.38 | 0.86 | 1.65 | 1.30 | 0.86 | 0.07 | 0.04 | 0.60 | 1.68 | 0.47 | -0.41 | 0.40 | 0.75 | 0.50 | 0.32 | -0.29 | 0.36 | 0.04 | 1.24 | -0.38 | -0.16 | -1.75 | 0.47 | 0.01 |
| FCF Conversion (FCF/Net Income) | 1.90x | 2.40x | 1.22x | 1.42x | 0.61x | 1.23x | 3.42x | 9.50x | 0.78x | 1.96x | 1.26x | 1.88x | -0.92x | 1.76x | 0.50x | 1.80x | 0.60x | 0.41x | -0.06x | 1.99x | 1.62x | 1.62x | -0.47x | 3.76x | -0.94x | 1.96x | -0.20x | -0.24x | 0.49x | 0.72x | 0.10x |
| Interest Paid | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 2.25M | 2.25M | 2.25M | 2.25M | 2.19M | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 |
| Taxes Paid | 3.4M | 36.04M | 35.51M | 34.1M | 58.69M | 23.77M | 6.42M | 0 | 4.3M | 14.61M | 10.98M | 2.01M | 1.07M | 5.49M | 2.4M | 2.45M | 916K | 3.06M | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 |
Quick answers to the most common questions about buying ONTO stock.
Onto Innovation Inc. (ONTO) generated $328.3M in net cash from operating activities in 2025. This reflects the cash generated directly from core business operations.
Onto Innovation Inc. (ONTO) generated $299.8M in free cash flow in 2025. Free cash flow is the cash left over after capital expenditures, which can be used to pay dividends, repurchase shares, or pay down debt.
Onto Innovation Inc. (ONTO) spent $28.5M on capital expenditures in 2025. CapEx represents the cash invested in physical assets like property, plant, and equipment to maintain or grow the business.
In 2025, Onto Innovation Inc. (ONTO) spent $75.0M on share repurchases. This shows the company's commitment to returning capital to its equity investors.
Key Metrics
Top Statement Risk
Margin volatility from mix
Metrics are mathematically derived from official filings.
Cash Conversion Volatility Signals Mix Shifts
ONTO's OCF/NI swung from 9.02 in 2025Q4 to 0.78 in 2026Q1, per reported cash flow data, indicating significant timing effects in working capital and earnings quality.
The extreme OCF/NI ratio in 2025Q4 (9.02) suggests that quarter's net income was depressed by non-cash charges or accrual reversals, while operating cash flow benefited from working capital releases. Conversely, 2026Q1's ratio of 0.78 indicates that earnings were not fully converted to cash, likely due to working capital outflows. This volatility implies that quarterly net income is not a reliable proxy for cash generation, and investors should focus on cumulative cash conversion over multiple quarters.
Free Cash Flow Rebound on AI Packaging Demand
FCF margin expanded to 16.9% in 2026Q2 from 7.8% in 2026Q1, as reported in the cash flow statement, reflecting a sharp recovery in operating cash flow and disciplined capex.
The sequential improvement in FCF margin aligns with the revenue surge and operating leverage noted in the income statement. However, the 2026Q2 FCF of $57.9M remains below the 2025Q4 peak of $89.9M, suggesting that the working capital drag in 2026Q1 was not fully reversed. The trajectory appears positive, but the sustainability depends on continued strong collections and inventory management as revenue grows.
Low Capital Intensity Supports Cash Generation
CapEx/Revenue averaged only 2.7% over the last ten quarters, per cash flow data, indicating a highly asset-light model that converts most operating cash flow into free cash flow.
The consistently low capex intensity (ranging from 0.6% to 5.4% of revenue) suggests that ONTO's growth does not require heavy capital investment, which is typical for a software-enabled metrology and inspection provider. This allows the company to generate substantial FCF even during periods of modest revenue growth. However, the spike to 5.4% in 2025Q2 may indicate a temporary increase in tooling or facility investments, but the overall trend remains favorable for shareholder returns.
Working Capital Swings Reflect Customer Timing
Working capital changes swung from +$41.2M in 2025Q3 to -$41.6M in 2026Q1, per reported cash flow data, indicating significant volatility in collections and payables.
The large positive working capital change in 2025Q3 (cash inflow) suggests strong collections or deferred revenue, while the negative changes in 2026Q1 and 2026Q2 indicate inventory build-up or slower collections, possibly due to the revenue surge. This pattern is consistent with customer acceptance-based revenue recognition, where cash lags shipments. Investors should monitor whether working capital absorption moderates as revenue growth normalizes.
Aggressive Buybacks Offset by Acquisition Outflows
ONTO repurchased $205M in 2026Q2 and $150M in 2025Q4, per cash flow data, while also spending $436M on acquisitions in 2025Q4, indicating a shift toward capital deployment.
The company has been returning significant cash to shareholders through buybacks, with no dividends paid, which aligns with a growth-oriented capital allocation strategy. The $436M acquisition outflow in 2025Q4 suggests a major M&A transaction that may have been funded by existing cash and operating cash flow. Given the fortress balance sheet with $346M cash and negligible debt, these deployments appear well-supported, but the pace of buybacks may be unsustainable if cash generation slows.
Cumulative Cash Generation Exceeds Net Income
Over the last ten quarters, cumulative operating cash flow of $661.7M exceeded cumulative net income of $432.3M, per reported cash flow data, indicating high earnings quality.
The cumulative OCF/NI ratio of 1.53 suggests that ONTO's earnings are backed by strong cash generation, with non-cash charges like D&A and SBC adding back to cash flow. However, the quarterly volatility in OCF/NI (ranging from 0.78 to 9.02) indicates that timing differences can distort single-period comparisons. The overall trend supports the view that the company's earnings are of high quality, but investors should be cautious of quarters where OCF lags net income, as they may signal working capital build-ups.
What Could Invalidate the Base Case
Despite robust cumulative cash generation, the 2026Q1 OCF/NI of 0.78 and negative working capital changes suggest potential earnings quality issues, per reported cash flow data.
The cash flow statement obscures the impact of stock-based compensation (SBC), which totaled $10.0M in 2026Q2, and the timing of customer acceptances that can delay cash collections. The $436M acquisition outflow in 2025Q4 may indicate integration risks or overpayment, which could pressure future cash flows. Additionally, the reliance on China for revenue exposes the company to geopolitical risks that could disrupt cash generation. Investors should monitor whether the working capital drag persists and whether the acquisition delivers expected synergies.